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Okinawa Institute of Science and Technology

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11:39

2026-06-17

oist.jp

artificial-intelligence

Redesigned high-NA lithography optical system aims to revolutionize chipmaking

Professor Tsumoru Shintake of the Okinawa Institute of Science and Technology has proposed a redesigned high-NA EUV lithography optical system that could eliminate mask 3D effects, enhance resolution,…

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Tsumoru Shintake 1 International Energy Agency 1 Journal of Micro/Nanopatterning, Materials, and Metrology 1